Microelectromechanical system (MEMS) is a method of constructing integrated sensors and actuators using layer deposition, surface patterning and etching to form 3D structures in semiconductors, metals and plastics.
Prof. Syms introduced the application of MEMS devices for small diagnostic systems in chemistry, biochemistry and medicine.
He shared some biomedical cases such as Caliper (Lab on a chip components & systems), Cardio MEMS (In-vivo monitoring system). Then he mentioned the Mass Spectrometer employs MEMS Quadrupole (The device is formed from two bonded silicon-on-insulator (BSOI) substrates, which are attached together to form a monolithic block.) Then he briefed Nanoelectrospray can be used in LC-MS and CE-MS, and MEMS is used in Nanospray source.
Mass Spectrometer chip on PCB
MEMS devices for cell control for In-vivo experimentation, and MEMS cell stressing device were mentioned.
Moreover, the technique can be applied in the sensors for internal in-vivo Magnetic Resonance Imaging so that the resolution could be improved (19F Magnetic Resonance Spectroscopy) for identifying the Cholangiocarcinoma (It is a cancer of the bile ducts which drain bile from the liver into the small intestine.). Another application is in RF tissue fusion (cutting by using RF).
Finally, he concluded that many applications of MEMS could be found in biomedical engineering, microanalytical instrument and system for in-vitro experiment, etc.
Geear M. and Syms R.A. (2005) “Monolithic MEMS Quadrupole Mass Spectrometers by Deep Silicon Etching” Journal of Microelectromechanical Systems, Vol. 14, No. 5, pp.1156-1166.